@article{article,
  author = {Gheorghe Stan},
  title = {Calibration method for the height and linearity of an AFM z-piezo transducer in the sub-nanometer to nanometer range using stepped surfaces},
  year = {2026},
  month = {2026-08-19 04:00:00},
  publisher = {Measurement Science \& Technology},
  url = {https://nps-ext.nist.gov/nps/nps_public_api/api/Publication/file/961549},
  language = {en},
}