@article{article, author = {Gheorghe Stan and Nicolas Alderete and Cristian Victor Ciobanu and Paresh Daharwal}, title = {Probing the Nanoscale Onset of Plasticity in Electroplated Copper for Hybrid Bonding Structures via Multimodal Atomic Force Microscopy}, year = {2025}, month = {2025-12-19 05:12:00}, publisher = {ACS Applied Nano Materials}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=960439}, doi = {https://doi.org/10.1021/acsanm.5c05142}, language = {en}, }