@article{article, author = {Gheorghe Stan and Cristian Victor Ciobanu}, title = {Perspective on high-entropy alloys and high-entropy nitrides as diffusion barriers for copper metallization}, year = {2025}, month = {2025-09-01 04:09:00}, publisher = {Materials Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959607}, doi = {https://doi.org/10.1016/j.matlet.2025.138578}, language = {en}, }