@article{article, author = {Jonathan Cripe and Sven Schulze and Stephan Schlamminger and Gordon Shaw and Frank Seifert}, title = {Electrostatic force method to determine flexure stiffness with integrated fiber-optic displacement interferometer}, year = {2026}, month = {2026-01-07 05:01:00}, publisher = {Measurement Science and Technology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958836}, language = {en}, }