@conference{conference,
  author = {Bryan Barnes and Purnima Balakrishnan and John Burnett and Aaron Chew and Colton Dudley and Thomas Germer and Steven Grantham and Stephanie Moffitt and Eric Shirley and Martin Sohn and Daniel Sunday},
  title = {Harnessing the extreme ultraviolet for critical dimension metrology},
  year = {2026},
  month = {2026-03-17 04:03:00},
  publisher = {Frontiers of Characterization and Metrology for Nanomaterials 2026, Monterey, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=961343},
  language = {en},
}