@misc{misc,
  author = {Bryan Barnes},
  title = {Harnessing the extreme ultraviolet for critical dimension metrology},
  year = {2026},
  month = {2026-06-09 04:06:00},
  publisher = {FCMN presentation archives},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=962164},
  language = {en},
}