@article{1344941,
  author = {Albert Shih and Wei Gao and Gregory Vogl and Dragan Djurdjanovic and Takafumi Fukushima and Ajay Malshe},
  title = {Innovations in advanced processes and systems for semiconductor manufacturing},
  year = {2026},
  number = {75},
  month = {2026-06-30 04:06:00},
  publisher = {CIRP Annals-Manufacturing Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=961532},
  doi = {https://doi.org/10.1016/j.cirp.2026.04.115},
  language = {en},
}