@conference{134366,
  author = {Seong-Eun Park and Nhan Nguyen and Joseph Kopanski and John Suehle and Eric Vogel},
  title = {Comparison of scanning capacitance microscopy and scanning Kelvin probe microscopy in determining two-dimensional doping profiles of Si homostructures},
  year = {2006},
  number = {24},
  month = {2006-02-01},
  publisher = {Ultra Shallow Junction 2005, Daytona Beach, FL},
  language = {en},
}