@article{1343506, author = {John Diulus and Ashley Head and J. Anibal Boscoboinik and Andrei Kolmakov}, title = {Operando XPS in reactive plasmas: The importance of the wall reactions}, year = {2026}, number = {43}, month = {2026-05-15 04:05:00}, publisher = {Journal of Vacuum Science & Technology A}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959473}, doi = {https://doi.org/10.1116/6.0004569}, language = {en}, }