@article{134336,
  author = {Nhan Nguyen and Safak Sayan and Igor Levin and James Ehrstein and I.J.R. Baumvol and C. Driemeier and L Wielunski and Pui-Yee Hung and Alain Diebold},
  title = {Optical Bandgaps and Composition Dependence of Hafnium Aluminate Thin Films grown by Atomic Layer Chemical Vapor Deposition},
  year = {2005},
  number = {23},
  month = {2005-11-17},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}