@article{1342781, author = {Abdulrahman Alghamdi and Feiyang Ou and Berc Kalanyan and James Maslar and Panagiotis Christofides}, title = {A CFD-Based Digital Twin Framework for Transient MoCl5 Transport in an Experimental Atomic Layer Deposition Process}, year = {2026}, month = {2026-03-23 00:03:00}, publisher = {Digital Chemical Engineering}, language = {en}, }