@misc{134251,
  author = {Herbert Bennett and Alain Diebold and C. Garner},
  title = {Will Future Measurement Needs for the Semiconductor Industry Be Met?},
  year = {2007},
  number = {112},
  month = {2007-01-01},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32296},
  language = {en},
}