@conference{134116,
  author = {Joseph Kopanski and Thomas Walker},
  title = {Scanning Probe Microscopy for Dielectric and Metal Characterization},
  year = {2008},
  number = {13},
  month = {2008-06-10},
  publisher = {Electrochemical Society Transactions, Dielectrics for Nanosystems III, Phoenix, AZ},
  language = {en},
}