@misc{1340626,
  author = {Victor Vartanian and Paul McClure and Vladimir Mancevski and Joseph J. Kopanski and Phillip Rack and Ilona Sitnitsky and Matthew Bresin and Vincent LaBella and Kathleen Dunn},
  title = {Carbon nanotube applications to scanning probe microscopy for next generation semiconductor metrology},
  year = {2010},
  month = {2010-08-03 00:08:00},
  language = {en},
}