@article{1337601,
  author = {James Maslar and William A. Kimes and Brent Sperling and Ravindra Kanjolia},
  title = {Non-dispersive infrared gas analyzer for vapor density measurements of a carbonyl-containing organometallic cobalt precursor},
  year = {2017},
  number = {71},
  month = {2017-12-01 00:12:00},
  publisher = {Applied Spectroscopy},
  doi = {https://doi.org/10.1177/0003702817716939},
  language = {en},
}