@article{1337201,
  author = {Mark Sobolewski},
  title = {Effects of Wafer Impedance on the Monitoring and Control of Ion Energy in Plasma Reactors},
  year = {2006},
  number = {100},
  month = {2006-09-15 00:09:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}