@article{1336936,
  author = {Ronald G. Dixson and Boon Ping Ng and Xavier Bonnaud and Ndubuisi Orji},
  title = {Interactions of Higher Order Tip Effects in CD-AFM Linewidth Metrology},
  year = {2015},
  number = {33},
  month = {2015-04-30 00:04:00},
  publisher = {Journal of Vacuum Science and Technology B},
  doi = {https://doi.org/10.1116/1.4919090},
  language = {en},
}