@conference{1335831,
  author = {Martin Sohn and Bryan Barnes and Hui Zhou and Richard Silver},
  title = {Quantitative tool characterization of a 193 nm scatterfield microscope},
  year = {2015},
  number = {9556},
  month = {2015-09-09 00:09:00},
  publisher = {Nanoengineering: Fabrication, Properties, Optics, and Devices XII, San Diego, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919267},
  doi = {https://doi.org/10.1117/12.2188224},
  language = {en},
}