@article{1334696,
  author = {Jabez McClelland and W Anderson and C Bradley and M Walkiewicz and R Deslattes and E Jurdik and Robert Celotta},
  title = {Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition},
  year = {2003},
  number = {108},
  month = {2003-03-01 00:03:00},
  publisher = {Journal of Research of the National Institute of Standards and Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620548},
  language = {en},
}