@misc{1333771,
  author = {David G. Seiler},
  title = {Metrology, Nanocharacterization and Instrumentation for Emerging Nanotechnology and Nanoelectronics: Electrical and Optical Characterization},
  year = {2007},
  month = {2007-12-09 00:12:00},
  publisher = {Metrology, Nanocharacterization, and Instrumentation for Emerging Nanotechnology and Nanoelectronics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32866},
  language = {en},
}