@article{1325376,
  author = {Ndubuisi Orji and Ronald G. Dixson and Domingo Garcia-Gutierrez and Bunday Benjamin and M Bishop and Michael Cresswell and Richard Allen and John Allgair},
  title = {Transmission Electron Microscope Calibration Methods for Critical Dimension Standards},
  year = {2016},
  number = {15},
  month = {2016-10-13 00:10:00},
  publisher = {Journal of Micro/Nanopatterning, Materials, and Metrology},
  doi = {https://doi.org/10.1117/1.JMM.15.4.044002},
  language = {en},
}