@article{1323711,
  author = {Charles D. Ehrlich},
  title = {A note on flow rate and leak rate units},
  year = {1986},
  month = {1986-04-28 00:04:00},
  publisher = {Journal of Vacuum Science & Technology A},
  doi = {https://doi.org/10.1116/1.574081},
  language = {en},
}