@conference{1321511,
  author = {Martin Sohn and Richard Quintanilha and Bryan Barnes and Richard Silver},
  title = {193 nm Angle-Resolved Scatterfield Microscope for Semiconductor Metrology},
  year = {2009},
  number = {7405},
  month = {2009-08-24 00:08:00},
  publisher = {Proceedings SPIE Optics & Photonics, San Diego, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903754},
  language = {en},
}