@conference{1321236,
  author = {Jing Qin and Hui Zhou and Bryan Barnes and Francois Goasmat and Ronald G. Dixson and Richard Silver},
  title = {Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization},
  year = {2012},
  number = {8466},
  month = {2012-10-11 00:10:00},
  publisher = {Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912169},
  doi = {https://doi.org/10.1117/12.946120},
  language = {en},
}