@article{1311801, author = {Shigeo Tanuma and Cedric J. Powell and David Penn}, title = {Calculations of Electron Inelastic Mean Free Paths III. Data for 15 Inorganic Compounds over the 50-2000 eV Range}, year = {1991}, number = {17}, month = {1991-01-01 00:01:00}, publisher = {Surface and Interface Analysis}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620391}, language = {en}, }