@article{1311741,
  author = {Jabez McClelland and R Scholten and E Palm and Robert Celotta},
  title = {Laser Focused Atomic Deposition},
  year = {1993},
  number = {262},
  month = {1993-11-05 00:11:00},
  publisher = {Science},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620427},
  language = {en},
}