@article{1311356,
  author = {K Berggren and A Bard and J Wilbur and John Gillaspy and A Helg and Jabez McClelland and S Rolston and William D. Phillips and M Prentiss and G Whitesides},
  title = {Microlithography by Using Neutral Metastable Atoms and Self-Assembled Monolayers},
  year = {1995},
  number = {269},
  month = {1995-09-01 00:09:00},
  publisher = {Science},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620452},
  language = {en},
}