@article{1309616, author = {Shigeo Tanuma and Cedric J. Powell and David Penn}, title = {Material Dependence of Electron Inelastic Mean Free Paths at Low Energies}, year = {1990}, number = {8}, month = {1990-01-01 00:01:00}, publisher = {Journal of Vacuum Science and Technology A}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620370}, language = {en}, }