@article{1309086,
  author = {Shigeo Tanuma and Cedric J. Powell and David Penn},
  title = {Dependence of inelastic electron mean free paths on electron energy and material},
  year = {1988},
  number = {A6},
  month = {1988-05-01 00:05:00},
  publisher = {Journal of Vacuum Science and Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620311},
  language = {en},
}