@article{1308356, author = {R Scholten and Jabez McClelland and E Palm and A Gavrin and Robert Celotta}, title = {Nanostructure Fabrication via Direct Writing with Atoms Focused in Laser Fields}, year = {1994}, number = {12}, month = {1994-05-01 00:05:00}, publisher = {Journal of Vacuum Science and Technology B}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620437}, language = {en}, }