@article{1304651,
  author = {Peter Bajcsy and Pushkar Sathe and Andras Vladar},
  title = {Relating Human and AI-based Detection Limits in SEM Dimensional Metrology},
  year = {2025},
  number = {24},
  month = {2025-10-25 04:10:00},
  publisher = {Journal of Micro/Nanopatterning, Materials, and Metrology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=960148},
  doi = {https://doi.org/10.1117/1.JMM.24.4.044201},
  language = {en},
}