@article{1302891, author = {Sarang Mittal and Kazemi Adachi and Nicholas E. Frattini and Maxwell Urmey and S-X Lin and Alec Emser and C Metzberger and L Talamo and S. Dickson and D. Carlson and Scott Papp and Cindy Regal and Konrad Lehnert}, title = {Annealing reduces SI3N4 microwave-frequency dielectric loss in superconducting resonators}, year = {2024}, number = {21}, month = {2024-05-22 04:05:00}, publisher = {Physical Review Applied}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957253}, language = {en}, }