@article{1302321, author = {Megan Kelleher and Konrad Ziegler and Jeremy Robin and Lianxin Huang and Mitchel Button and Liam Mauck and Peter Brewer and Danny Kim and John Kitching and William McGehee and Travis Autry}, title = {Wafer-Scale Micro-Knife Sealed Vacuum Cells for Quantum Devices}, year = {2026}, month = {2026-01-29 05:01:00}, publisher = {Physical Review Applied}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=961413}, language = {en}, }