@conference{130081, author = {Ulf Griesmann and Quandou Wang and Marc Tricard and Paul Dumas and Christopher Hill}, title = {Manufacture and Metrology of 300 mm Silicon Wafers with Ultra-Low Thickness Variations}, year = {2007}, number = {931}, month = {2007-01-02}, publisher = {Characterization and Metrology for Nanoelectronics: 2007 International conference on Frontiers of Characterization and Metrology, Washington, DC}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823030}, language = {en}, }