@conference{129866,
  author = {Ulf Griesmann and Quandou Wang and T Raymond},
  title = {Optical Flatness Metrology for 300 mm Silicon Wafers},
  year = {2005},
  number = {788},
  month = {2005-04-01},
  publisher = {American Institute of Physics Proceedings of the 2005 Conference on Characterization and Metrology for ULSI Technology, Dallas, TX},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822272},
  language = {en},
}