@article{1293811, author = {Gheorghe Stan and Sean King}, title = {Atomic force microscopy for nanoscale mechanical property characterization}, year = {2020}, month = {2020-11-10 05:11:00}, publisher = {Journal of Vacuum Science and Technology B}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=930876}, language = {en}, }