@article{1291606,
  author = {James Maslar and William A. Kimes and Brent Sperling and Ravindra Kanjolia},
  title = {Characterization of vapor draw vessel performance for low-volatility solid precursor delivery},
  year = {2020},
  number = {39},
  month = {2020-12-10 05:12:00},
  publisher = {Journal of Vacuum Science & Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=930820},
  doi = {https://doi.org/10.1116/6.0000676},
  language = {en},
}