@article{1290761,
  author = {Ulf Griesmann and Sofia Corzo Garcia},
  title = {Fabrication Error Detection in Diffraction Gratings with High-Dynamic-Range Fourier Plane Imaging and Spatial Filtering},
  year = {2023},
  month = {2023-01-02 05:01:00},
  publisher = {Optical Engineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934926},
  language = {en},
}