@conference{1290756,
  author = {Ulf Griesmann and Keiko Munechika and Thomas Renegar and Xiaoyu Zheng and Johannes Soons and Weilun Chao and Ian Lacey and Carlos Pina-Hernandez and Peter Takacs and Valeriy Yashchuk and Thomas Germer},
  title = {Characterization of Surface Texture-Measuring Optical Microscopes using a Binary Pseudo-Random Array Standard},
  year = {2022},
  month = {2022-10-03 04:10:00},
  publisher = {Proceedings of SPIE 12223, San Diego, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935281},
  language = {en},
}