@article{1290601,
  author = {Bruce Ravel and Matthias Gottwald and Christian Lavoie and Jean Jordan-Sweet and Steve Brown and Guohan Hu},
  title = {Quantitative Analysis of the Crystallinity of CoFeB Layers in Magnetic Random-Access Memory (MRAM) Stacks Using Extended X-ray Absorption Fine Structure Spectroscopy},
  year = {2025},
  month = {2025-09-03 04:09:00},
  publisher = {Journal of Vacuum Science & Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958890},
  doi = {https://doi.org/10.1116/6.0004422},
  language = {en},
}