@conference{1290586,
  author = {Aaron Chew and Bryan Barnes and Eric Shirley and Thomas Germer},
  title = {Ellipsometry in the EUV Regime},
  year = {2025},
  number = {13426},
  month = {2025-04-24 04:04:00},
  publisher = {Metrology, Inspection, Process Control, xxxix, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959589},
  doi = {https://doi.org/10.1117/12.3053165},
  language = {en},
}