@article{1289491,
  author = {Raymond Simmonds and Sudhir Sahu and Trevyn Larson and Florent Lecocq and Tongyu Zhao and Anthony McFadden},
  title = {Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications},
  year = {2025},
  month = {2025-01-22 05:01:00},
  publisher = {npj Quantum Information},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958235},
  language = {en},
}