@article{1288506,
  author = {David Lahr and Joshua Hertz and Stephen Semancik},
  title = {A Combinatorial Study of Thin Film Process Variables Using Microhotplates},
  year = {2010},
  month = {2010-02-17 05:02:00},
  publisher = {IEEE Journal of Microelectromechanical Systems (Journal of MEMs)},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901990},
  doi = {https://doi.org/10.1109/JMEMS.2010.2040242},
  language = {en},
}