@article{1285676,
  author = {Xu Han and Marcella Miller and James Moyne and Gregory Vogl and Anita Penkova and Xiaodong Jia},
  title = {A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling},
  year = {2025},
  number = {38},
  month = {2025-01-20 05:01:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958452},
  doi = {https://doi.org/10.1109/TSM.2025.3531920},
  language = {en},
}