@conference{1279636, author = {Wataru Yamane and Daron Westly and Glenn Holland and Yu Yamazawa and Naoto Ito and Andras Vladar and John Villarrubia}, title = {Multi-technique reference measurement of critical dimension and shape for model validation in scanning electron microscopy}, year = {2025}, number = {13426}, month = {2025-04-22 04:04:00}, publisher = {Metrology, Inspection, and Process Control XXXIX, San Jose, CA, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959651}, doi = {https://doi.org/10.1117/12.3046309}, language = {en}, }