@conference{1279636,
  author = {Wataru Yamane and Daron Westly and Glenn Holland and Yu Yamazawa and Naoto Ito and Andras Vladar and John Villarrubia},
  title = {Multi-technique reference measurement of critical dimension and shape for model validation in scanning electron microscopy},
  year = {2025},
  number = {13426},
  month = {2025-04-22 04:04:00},
  publisher = {Metrology, Inspection, and Process Control XXXIX, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959651},
  doi = {https://doi.org/10.1117/12.3046309},
  language = {en},
}