@article{1279146,
  author = {Shannon Duff and Jason Austermann and James Beall and David Daniel and Johannes Hubmayr and Gregory Jaehnig and Bradley Johnson and Dante Jones and Michael J. Link and Tammy Lucas and Rita Sonka and Suzanne Staggs and Joel Ullom and Yuhan Wang},
  title = {The Simons Observatory: Production-Level Fabrication of the Mid- and Ultra-High-Frequency Wafers},
  year = {2024},
  number = {216},
  month = {2024-05-04 04:05:00},
  publisher = {Journal of Low Temperature Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956921},
  doi = {https://doi.org/10.1007/s10909-024-03117-x},
  language = {en},
}