@conference{1278591,
  author = {Gaoliang Dai and Jens Fluegge and Harald Bosse and Ronald G. Dixson},
  title = {A bottom-up approach for traceable nano dimensional metrology},
  year = {2017},
  month = {2017-05-29 04:05:00},
  publisher = {Euspen - 17th International Conference and Exhibition, Hannover, DE},
  language = {en},
}