@article{1265211, author = {Robert Jones and Jerome Cheron and Benjamin Jamroz and Dylan Williams and Ari Feldman and Peter Aaen and Christian Long and Nathan Orloff}, title = {On-Wafer Capacitor Characterization Including Uncertainty Estimates Up to 1.0 THz}, year = {2024}, number = {14}, month = {2024-07-19 04:07:00}, publisher = {IEEE Transactions on Terahertz Science and Technology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957140}, doi = {https://doi.org/10.1109/TTHZ.2024.3431190}, language = {en}, }