@conference{125621,
  author = {Thomas Germer and G Mulholland},
  title = {Particle Size Metrology: Comparison Between Aerosol Electrical Mobility and Laser Surface Light Scattering Techniques, ed. by D.G. Seiler, A.C. Diebold, R. McDonald, C.R. Ayre, R.P. Khosla, S. Zollner, and E.M. Secula},
  year = {2005},
  number = {788},
  month = {2005-01-01},
  publisher = {Characterization and Metrology for ULSI Technology 2005 , Tokyo, JA},
  language = {en},
}