@article{125551,
  author = {Thomas Germer and B Scheer},
  title = {Polarization of out-of-plane optical scatter from SiO<sub>2</sub> films grown on photolithographically-generated microrough silicon, ed. by Z.H. Gu and A.A. Maradudin},
  year = {1998},
  number = {3426},
  month = {1998-01-01},
  publisher = {Scattering and Surface Roughness II SPIE},
  language = {en},
}